Authors: WEBSTER MN TUINHOUT A VERBRUGGEN AH ROMIJN J RADELAAR S LOCHEL B JOS HFF MOORS PMA

Citation: Mn. Webster et al., FABRICATION OF 100 NM POLYSILICON-EMITTER TRANSISTORS USING E-BEAM LITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 91-94

Authors: WEBSTER MN TUINHOUT A LOCHEL B VERBRUGGEN AH ROMIJN J VANDERDRIFT E RADELAAR S JOS HFF MOORS PMA

Citation: Mn. Webster et al., METALLIZATION OF SUBMICRON MICROWAVE BIPOLAR-TRANSISTORS BY ELECTROPLATING, Microelectronic engineering, 23(1-4), 1994, pp. 441-444

Authors: WEBSTER MN VERBRUGGEN AH JOS HFF ROMIJN J MOORS PMA RADELAAR S

Citation: Mn. Webster et al., PATTERNING OF A TI PT/AU METALLIZATION FOR SUBMICRON BIPOLAR-TRANSISTORS MADE BY DIRECT WRITE E-BEAM LITHOGRAPHY/, Microelectronic engineering, 21(1-4), 1993, pp. 423-426