Citation: V. Konoplev et al., MC COMPUTER-SIMULATIONS OF THE PREFERENTIAL SPUTTERING OF SI-GE ALLOYS, Radiation effects and defects in solids, 130, 1994, pp. 267-280
Authors:
MORENOMARIN JC
ABRIL I
GRASMARTI A
KONOPLEV V
JIMENEZRODRIGUEZ JJ
PEREZMARTIN AMC
Citation: Jc. Morenomarin et al., ENERGY-SPECTRA OF REFLECTED AND SPUTTERED PARTICLES IN MAGNETRON DEPOSITION SYSTEMS, Vacuum, 45(10-11), 1994, pp. 1135-1137