Authors: SARASWAT KC APTE PP BOOTH L CHEN YZ DANKOSKI PCP DEGERTEKIN FL FRANKLIN GF KHURIYAKUB BT MOSLEHI MM SCHAPER C GYUGYI PJ LEE YJ PEI J WOOD SC

Citation: Kc. Saraswat et al., RAPID THERMAL MULTIPROCESSING FOR A PROGRAMMABLE FACTORY FOR ADAPTABLE MANUFACTURING OF ICS, IEEE transactions on semiconductor manufacturing, 7(2), 1994, pp. 159-175

Authors: MOSLEHI MM VELO L PARANJPE A KUEHNE J HUANG S CHAPMAN R SCHAPER C BREEDIJK T NAJM H YIN D LEE YJ ANDERSON D DAVIS C

Citation: Mm. Moslehi et al., FAST-CYCLE-TIME SINGLE-WAFER IC MANUFACTURING, Microelectronic engineering, 25(2-4), 1994, pp. 93-130

Authors: MOSLEHI MM PARANJPE A VELO LA KUEHNE J

Citation: Mm. Moslehi et al., RTP - KEY TO FUTURE SEMICONDUCTOR FABRICATION, Solid state technology, 37(5), 1994, pp. 37

Authors: BARNA GG MOSLEHI MM LEE YJ

Citation: Gg. Barna et al., SENSOR NEEDS FOR IC MANUFACTURING, Solid state technology, 37(4), 1994, pp. 57

Authors: MOSLEHI MM DAVIS CJ PARANJPE A VELO LA NAJM HN SCHAPER C BREEDIJK T LEE YJ ANDERSON D

Citation: Mm. Moslehi et al., SINGLE-WAFER PROCESSING TOOLS FOR AGILE SEMICONDUCTOR, Solid state technology, 37(1), 1994, pp. 35

Authors: SCHAPER CD MOSLEHI MM SARASWAT KC KAILATH T

Citation: Cd. Schaper et al., MODELING, IDENTIFICATION, AND CONTROL OF RAPID THERMAL-PROCESSING SYSTEMS, Journal of the Electrochemical Society, 141(11), 1994, pp. 3200-3209