Citation: F. Komatsu et al., A NEW AUTOFOCUS USING IMAGE-PROCESSING TECHNIQUES IN CRITICAL DIMENSION MEASUREMENT SEM, IEICE transactions on information and systems, E81D(7), 1998, pp. 738-742
Citation: F. Komatsu et al., A FULLY AUTOMATED MEASUREMENT OF A HOLE PATTERN USING IMAGE-PROCESSING TECHNIQUE, Journal of Electron Microscopy, 47(5), 1998, pp. 471-476