Authors: VLADIMIROV VV GORSHKOV VN MOTRICH VA PANCHENKO OA STETSENKO BV SKRIPNIK EF

Citation: Vv. Vladimirov et al., INSTABILITY OF REACTIVE SPUTTERING IN MAG NETRON DUE TO THE PREPARATION OF BINARY COMPOUND FILMS, Zurnal tehniceskoj fiziki, 64(5), 1994, pp. 91-102