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REGOLINI JL
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DEBARROS O
BREMOND G
LETRON B
MOUIS M
VINCENT G
ASHBURN P
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DENORME S
DEBERRANGER E
MATHIOT D
MOUIS M
PONCET A
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DEBERRANGER E
BOUILLON P
MOUIS M
SKOTNICKI T
REGOLINI JL
Citation: S. Bodnar et al., SELECTIVE SI AND SIGE EPITAXIAL HETEROSTRUCTURES GROWN USING AN INDUSTRIAL LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION MODULE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(3), 1997, pp. 712-718
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GRANIER A
LAURENS M
REGOLINI JL
MOUIS M
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HASHIM MDR
ASHBURN P
MOUIS M
CHANTRE A
VINCENT G
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HASHIM MDR
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PARKER GJ
VINCENT G
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GREGORY HJ
DENORME S
MATHIOT D
ASHBURN P
ROBBINS DJ
GLASPER JL
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DOLLFUS P
MOUIS M
MEYER F
HESTO P
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