Authors:
MURZIN IH
TOMPA GS
FORSYTHE EW
WEI JJ
MURATOV V
FISCHER T
Citation: Ih. Murzin et al., USE OF SPUTTERING AND NEGATIVE CARBON ION SOURCES TO PREPARE CARBON NITRIDE FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 1179-1184