Authors: MUSHER JN GORDON RG

Citation: Jn. Musher et Rg. Gordon, ATMOSPHERIC-PRESSURE CHEMICAL-VAPOR-DEPOSITION OF TIN FROM TETRAKIS(DIMETHYLAMIDO)TITANIUM AND AMMONIA, Journal of materials research, 11(4), 1996, pp. 989-1001

Authors: MUSHER JN GORDON RG

Citation: Jn. Musher et Rg. Gordon, ATMOSPHERIC-PRESSURE CHEMICAL-VAPOR-DEPOSITION OF TITANIUM NITRIDE FROM TETRAKIS (DIETHYLAMIDO) TITANIUM AND AMMONIA, Journal of the Electrochemical Society, 143(2), 1996, pp. 736-744