Authors: Kinoshita, T Fukui, K Asaka, S Yoshida, H Watanabe, M Horigome, T Ma, PJ Ohtsuka, K Iwanaga, M Ohshima, E

Citation: T. Kinoshita et al., Development of a surface profiler for optical elements, NUCL INST A, 467, 2001, pp. 329-332