Authors:
Ma, TZ
Campbell, SA
Smith, R
Hoilien, N
He, BY
Gladfelter, WL
Hobbs, C
Buchanan, D
Taylor, C
Gribelyuk, M
Tiner, M
Coppel, M
Lee, JJ
Citation: Tz. Ma et al., Group IVB metal oxides high permittivity gate insulators deposited from anhydrous metal nitrates, IEEE DEVICE, 48(10), 2001, pp. 2348-2356
Authors:
Smith, RC
Ma, TZ
Hoilien, N
Tsung, LY
Bevan, MJ
Colombo, L
Roberts, J
Campbell, SA
Gladfelter, WL
Citation: Rc. Smith et al., Chemical vapour deposition of the oxides of titanium, zirconium and hafnium for use as high-k materials in microelectronic devices. A carbon-free precursor for the synthesis of hafnium dioxide, ADV MAT OPT, 10(3-5), 2000, pp. 105-114
Authors:
Smith, RC
Hoilien, N
Taylor, CJ
Ma, TZ
Campbell, SA
Roberts, JT
Copel, M
Buchanan, DA
Gribelyuk, M
Gladfelter, WL
Citation: Rc. Smith et al., Low temperature chemical vapor deposition of ZrO2 on Si(100) using anhydrous zirconium(IV) nitrate, J ELCHEM SO, 147(9), 2000, pp. 3472-3476