Authors: Yamagishi, H Kuramoto, M Shiraishi, Y Machida, V Takano, K Takase, N Iida, T Matsubara, J Minami, H Imai, M Takada, K

Citation: H. Yamagishi et al., Large diameter silicon technology and epitaxy, MICROEL ENG, 45(2-3), 1999, pp. 101-111