Authors:
Endle, JP
Sun, YM
Nguyen, N
Madhukar, S
Hance, RL
White, JM
Ekerdt, JG
Citation: Jp. Endle et al., Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films, THIN SOL FI, 388(1-2), 2001, pp. 126-133
Authors:
Sun, YM
Yan, XM
Mettlach, N
Endle, JP
Kirsch, PD
Ekerdt, JG
Madhukar, S
Hance, RL
White, JM
Citation: Ym. Sun et al., Precursor chemistry and film growth with (methylcyclopentadienyl) (1,5-cyclooctadiene)iridium, J VAC SCI A, 18(1), 2000, pp. 10-16
Authors:
Madhukar, S
Aggarwal, S
Dhote, AM
Ramesh, R
Samavedam, SB
Choopun, S
Sharma, RP
Citation: S. Madhukar et al., Pulsed laser-ablation deposition of thin films of molybdenum silicide and its properties as a conducting barrier for ferroelectric random-access memory technology, J MATER RES, 14(3), 1999, pp. 940-947
Authors:
Aggarwal, S
Madhukar, S
Nagaraj, B
Jenkins, IG
Ramesh, R
Boyer, L
Evans, JT
Citation: S. Aggarwal et al., Can lead nonstoichiometry influence ferroelectric properties of Pb(Zr,Ti)O-3 thin films?, APPL PHYS L, 75(5), 1999, pp. 716-718