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Results: 1
Growth of epitaxial silicon at low temperatures using hot-wire chemical vapor deposition
Authors:
Thiesen, J Iwaniczko, E Jones, KM Mahan, A Crandall, R
Citation:
J. Thiesen et al., Growth of epitaxial silicon at low temperatures using hot-wire chemical vapor deposition, APPL PHYS L, 75(7), 1999, pp. 992-994
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