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Results: 1-5 |
Results: 5

Authors: Issaev, NN Schrodt, AG Malek, CK
Citation: Nn. Issaev et al., Consumption-related development in microelectroforming, MICROSYST T, 7(1), 2001, pp. 44-46

Authors: Feldman, M Lee, GS Noel, D Malek, CK Bass, R
Citation: M. Feldman et al., Generation of arbitrary three dimensional surfaces by x-ray lithography, J VAC SCI B, 18(6), 2000, pp. 2976-2980

Authors: Malek, CK Yajamanyam, S
Citation: Ck. Malek et S. Yajamanyam, Evaluation of alternative development process for high-aspect-ratio poly(methylmethacrylate) microstructures in deep x-ray lithography, J VAC SCI B, 18(6), 2000, pp. 3354-3359

Authors: Ford, SM Davies, J Kar, B Qi, SD McWhorter, S Soper, SA Malek, CK
Citation: Sm. Ford et al., Micromachining in plastics using X-ray lithography for the fabrication of micro-electrophoresis devices, J BIOMECH E, 121(1), 1999, pp. 13-21

Authors: Malek, CK Wood, R Dudley, B Genova, P
Citation: Ck. Malek et al., Metrology study of structural transfer accuracy in fabrication of high-aspect-ratio microelectromechanical systems: From optical mask to polished electroplated parts, J VAC SCI B, 16(6), 1998, pp. 3552-3557
Risultati: 1-5 |