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Citation: Tg. Bifano et al., Microelectromechanical deformable mirrors, IEEE S T QU, 5(1), 1999, pp. 83-89

Authors: Mali, RK Bifano, T Koester, D

Citation: Rk. Mali et al., A design-based approach to planarization in multilayer surface micromachining, J MICROM M, 9(4), 1999, pp. 294-299