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A new method to build a high-voltage pulse supply using only semiconductorswitches for plasma-immersion ion implantation
Authors:
Redondo, LM Margato, E Silva, JF
Citation:
Lm. Redondo et al., A new method to build a high-voltage pulse supply using only semiconductorswitches for plasma-immersion ion implantation, SURF COAT, 136(1-3), 2001, pp. 51-54
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