Citation: C. Marxer et Nf. De Rooij, Micro-opto-mechanical 2x2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation, J LIGHTW T, 17(1), 1999, pp. 2-6
Authors:
Clerc, PA
Dellmann, L
Gretillat, F
Gretillat, MA
Indermuhle, PF
Jeanneret, S
Luginbuhl, P
Marxer, C
Pfeffer, TL
Racine, GA
Roth, S
Staufer, U
Stebler, C
Thiebaud, P
de Rooij, NF
Citation: Pa. Clerc et al., Advanced deep reactive ion etching: a versatile tool for microelectromechanical systems, J MICROM M, 8(4), 1998, pp. 272-278