Authors: Tsuno, M Tanaka, M Koh, M Iwamoto, K Murakami, H Shibahara, K Mattausch, MM

Citation: M. Tsuno et al., Suppression of reverse-short-channel effect in sub -0.1 mu m n-MOSFETs with Sb S/D implantation, ELECTR LETT, 35(6), 1999, pp. 508-509