Authors:
Hsueh, HP
McGrath, RT
Ji, B
Felker, BS
Langan, JG
Karwacki, EJ
Citation: Hp. Hsueh et al., Ion energy distributions and optical emission spectra in NF3-based processchamber cleaning plasmas, J VAC SCI B, 19(4), 2001, pp. 1346-1357
Authors:
McGrath, RT
Veerasingam, R
Hunter, JA
Rockett, PD
Campbell, RB
Citation: Rt. Mcgrath et al., Measurements and simulations of VUV emissions from plasma flat panel display pixel microdischarges, IEEE PLAS S, 26(5), 1998, pp. 1532-1542