Authors:
Wang, YX
De Carlo, F
Mancini, DC
McNulty, I
Tieman, B
Bresnahan, J
Foster, I
Insley, J
Lane, P
von Laszewski, G
Kesselman, C
Su, MH
Thiebaux, M
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Authors:
Winn, B
Ade, H
Buckley, C
Feser, M
Howells, M
Hulbert, S
Jacobsen, C
Kaznacheyev, K
Kirz, J
Osanna, A
Maser, J
McNulty, I
Miao, J
Oversluizen, T
Spector, S
Sullivan, B
Wang, Y
Wirick, S
Zhang, H
Citation: B. Winn et al., Illumination for coherent soft X-ray applications: the new X1A beamline atthe NSLS, J SYNCHROTR, 7, 2000, pp. 395-404
Authors:
Su, X
Stagarescu, C
Xu, G
Eastman, DE
McNulty, I
Frigo, SP
Wang, YX
Retsch, CC
Noyan, IC
Hu, CK
Citation: X. Su et al., Quantitative nanoscale metrology study of Cu/SiO2 interconnect technology using transmission x-ray microscopy, APPL PHYS L, 77(21), 2000, pp. 3465-3467