Authors:
Romanyuk, B
Melnik, V
Olikh, Y
Popov, V
Kruger, D
Citation: B. Romanyuk et al., Modification of the Si amorphization process by in situ ultrasonic treatment during ion implantation, SEMIC SCI T, 16(5), 2001, pp. 397-401
Authors:
Datsenko, L
Zymierska, D
Auleytner, J
Klinger, D
Machulin, V
Klad'ko, V
Melnik, V
Prokopenko, I
Czosnyka, T
Choinski, J
Citation: L. Datsenko et al., Structure changes in Cz-Si single crystals irradiated with fast oxygen andneon ions, ACT PHY P A, 96(1), 1999, pp. 137-142