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Results:
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Results: 1
Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
Authors:
Black, CT Guarini, KW Milkove, KR Baker, SM Russell, TP Tuominen, MT
Citation:
Ct. Black et al., Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication, APPL PHYS L, 79(3), 2001, pp. 409-411
Risultati:
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