Authors:
Misina, M
Shaginyan, LR
Macek, M
Panjan, P
Citation: M. Misina et al., Energy resolved ion mass spectroscopy of the plasma during CV reactive magnetron sputtering, SURF COAT, 142, 2001, pp. 348-354
Authors:
Kaganovich, I
Misina, M
Berezhnoi, SV
Gijbels, R
Citation: I. Kaganovich et al., Electron Boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonancedischarge, PHYS REV E, 61(2), 2000, pp. 1875-1889
Citation: J. Musil et M. Misina, Low pressure radio frequency and microwave discharges for d.c. sputtering of ferromagnetic materials, CZEC J PHYS, 50(6), 2000, pp. 785-794
Authors:
Berezhnoi, SV
Kaganovich, ID
Misina, M
Bogaerts, A
Gijbels, R
Citation: Sv. Berezhnoi et al., Semianalytical description of nonlocal secondary electrons in a radio frequency capacitively coupled plasma at intermediate pressures, IEEE PLAS S, 27(5), 1999, pp. 1339-1347