Authors:
Dimitrov, R
Tilak, V
Yeo, W
Green, B
Kim, H
Smart, J
Chumbes, E
Shealy, JR
Schaff, W
Eastman, LF
Miskys, C
Ambacher, O
Stutzmann, M
Citation: R. Dimitrov et al., Influence of oxygen and methane plasma on the electrical properties of undoped AlGaN/GaN heterostructures for high power transistors, SOL ST ELEC, 44(8), 2000, pp. 1361-1365