Authors:
Mitu, B
Dinescu, G
Dinescu, M
Ferrari, A
Balucani, M
Lamedica, G
Dementjev, AP
Maslakov, KI
Citation: B. Mitu et al., Multilayer structures induced by plasma and laser beam treatments on a-Si : H and a-SiC : H thin films, THIN SOL FI, 383(1-2), 2001, pp. 230-234
Citation: G. Dinescu et al., A double-chamber capacitively coupled RF discharge for plasma assisting deposition techniques, VACUUM, 56(1), 2000, pp. 83-86