Authors: Guziewicz, M Piotrowska, A Kaminska, E Golaszewska, K Turos, A Mizera, E Winiarski, A Szade, J

Citation: M. Guziewicz et al., Characteristics of sputter-deposited TiN, ZrB2 and W2B diffusion barriers for advanced metallizations to GaAs, SOL ST ELEC, 43(6), 1999, pp. 1055-1061