Authors: Hirose, M Mizubayashi, W",Khairurrijal,"Ikeda, M Murakami, H Kohno, A Shibahara, K Miyazaki, S

Citation: M. Hirose et al., Ultrathin gate dielectrics for silicon nanodevices, SUPERLATT M, 27(5-6), 2000, pp. 383-393