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Results:
1-4
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Results: 4
Energy distribution and depth profile in BF3 plasma doping
Authors:
Kwok, DTK Chu, PK Takase, M Mizuno, B
Citation:
Dtk. Kwok et al., Energy distribution and depth profile in BF3 plasma doping, SURF COAT, 136(1-3), 2001, pp. 146-150
Plasma doping: Progress and potential
Authors:
Chu, PK Felch, SB Kellerman, P Sinclair, F Larson, LA Mizuno, B
Citation:
Pk. Chu et al., Plasma doping: Progress and potential, SOL ST TECH, 42(9), 1999, pp. 55
Plasma doping: Progress and potential - Part two of two
Authors:
Chu, PK Felch, SB Kellerman, P Sinclair, F Larson, LA Mizuno, B
Citation:
Pk. Chu et al., Plasma doping: Progress and potential - Part two of two, SOL ST TECH, 42(10), 1999, pp. 77
Special issue on plasma processing
Authors:
Chan, C Mizuno, B Wood, BP
Citation:
C. Chan et al., Special issue on plasma processing, IEEE PLAS S, 26(6), 1998, pp. 1590-1591
Risultati:
1-4
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