Authors: Shimizu, A Endo, H Watanabe, H Obara, T Miyata, H Mizuta, O Takeuchi, K Kudo, Y Hashiguchi, T

Citation: A. Shimizu et al., Exposure method using photoresist mask for high-density optical disk mastering, JPN J A P 1, 39(2B), 2000, pp. 806-807