Authors:
Green, ML
Sorsch, TW
Timp, GL
Muller, DA
Weir, BE
Silverman, PJ
Moccio, SV
Kim, YO
Citation: Ml. Green et al., Understanding the limits of ultrathin SiO2 and Si-O-N gate dielectrics forsub50 nm CMOS, MICROEL ENG, 48(1-4), 1999, pp. 25-30
Authors:
O'Malley, ML
Timp, GL
Timp, W
Moccio, SV
Garno, JP
Kleiman, RN
Citation: Ml. O'Malley et al., Electrical simulation of scanning capacitance microscopy imaging of the pnjunction with semiconductor probe tips, APPL PHYS L, 74(24), 1999, pp. 3672-3674
Authors:
O'Malley, ML
Timp, GL
Moccio, SV
Garno, JP
Kleiman, RN
Citation: Ml. O'Malley et al., Quantification of scanning capacitance microscopy imaging of the pn junction through electrical simulation, APPL PHYS L, 74(2), 1999, pp. 272-274