Authors:
Morokov, YN
Novikov, YN
Gritsenko, VA
Wong, H
Citation: Yn. Morokov et al., Two-fold coordinated nitrogen atom: an electron trap in MOS devices with silicon oxynitride as the gate dielectric, MICROEL ENG, 48(1-4), 1999, pp. 175-178
Authors:
Gritsenko, VA
Wong, H
Xu, JB
Kwok, RM
Petrenko, IP
Zaitsev, BA
Morokov, YN
Novikov, YN
Citation: Va. Gritsenko et al., Excess silicon at the silicon nitride/thermal oxide interface in oxide-nitride-oxide structures, J APPL PHYS, 86(6), 1999, pp. 3234-3240