Authors: Erlat, AG Henry, BM Ingram, JJ Mountain, DB McGuigan, A Howson, RP Grovenor, CRM Briggs, GAD Tsukahara, Y

Citation: Ag. Erlat et al., Characterisation of aluminium oxynitride gas barrier films, THIN SOL FI, 388(1-2), 2001, pp. 78-86