Authors: Seki, H Ueno, Y Ichimura, S Takemori, S Uchikawa, S Murakamia, H Okada, S Mochizuki, Y Setoyama, E

Citation: H. Seki et al., Development of a locally-electron-heated plasma source for HDP-CVD process, VACUUM, 51(4), 1998, pp. 695-697