Authors: MCLANE GF MEYYAPPAN M LEE HS COLE MW ECKART DW LAREAU RT NAMAROFF M SASSERATH J

Citation: Gf. Mclane et al., MAGNETRON REACTIVE ION ETCHING OF GAAS IN A BCL3 DISCHARGE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 333-336