Authors:
MCLANE GF
MEYYAPPAN M
LEE HS
COLE MW
ECKART DW
LAREAU RT
NAMAROFF M
SASSERATH J
Citation: Gf. Mclane et al., MAGNETRON REACTIVE ION ETCHING OF GAAS IN A BCL3 DISCHARGE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 333-336