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Citation: Fn. Dultsev et al., POROUS STRUCTURE OF SILICA FILMS OBTAINED BY MONOSILANE OXIDATION, Thin solid films, 315(1-2), 1998, pp. 72-76

Authors: DULTSEV FN NENASHEVA LA VASILYEVA LL

Citation: Fn. Dultsev et al., IRREGULAR SURFACE AND POROUS STRUCTURE OF SIO2-FILMS DEPOSITED AT LOW-TEMPERATURE AND LOW-PRESSURE, Journal of the Electrochemical Society, 145(7), 1998, pp. 2569-2572

Authors: VASILEVA LL NENASHEVA LA NOSOV VV

Citation: Ll. Vasileva et al., KINETICS OF FORMATION OF SILICON DIOXIDE LAYERS DURING OXIDATION OF MONOSILANE IN THE PRESENCE OF AMMONIA, Kinetics and catalysis, 33(5-6), 1992, pp. 847-851