Authors:
COTE D
NGUYEN S
DOBUZINSKY D
BASA C
NEUREITHER B
Citation: D. Cote et al., HIGH SELECTIVITY MAGNETICALLY ENHANCED REACTIVE ION ETCHING OF BORON-NITRIDE FILMS, Journal of the Electrochemical Society, 141(12), 1994, pp. 3456-3462
Authors:
NEUREITHER B
BASA C
SANDWICK T
BLUMENSTOCK K
Citation: B. Neureither et al., BORON-NITRIDE AND SILICON BORON-NITRIDE FILM AND POLISH CHARACTERIZATION, Journal of the Electrochemical Society, 140(12), 1993, pp. 3607-3611