Citation: T. Yamamoto et al., MODIFICATION OF SURFACE-ENERGY, DRY-ETCHING, AND ORGANIC FILM REMOVALUSING ATMOSPHERIC-PRESSURE PULSED-CORONA PLASMA, IEEE transactions on industry applications, 31(3), 1995, pp. 494-499
Authors:
PERIASAMY R
NEWSOME JR
ENSOR DS
DONOVAN RP
RIDDLE J
Citation: R. Periasamy et al., MEASUREMENT OF MOISTURE AND TOTAL HYDROCARBON CONTRIBUTIONS BY VALVESUSED IN CLEAN ROOM GAS-DELIVERY SYSTEMS, Journal of the Electrochemical Society, 141(6), 1994, pp. 1653-1657