Authors:
ITO Y
MUKOYAMA T
OMOTE K
SHIMIZU K
NISAWA A
SHOJI T
TERAUCHI H
KUEHNER S
Citation: Y. Ito et al., STRUCTURAL EVALUATION OF A MO SI MULTILAYER, ANALYZED WITH VARIOUS WAVELENGTHS/, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 75(1-4), 1993, pp. 355-359