Authors: MITRA A NORDQUIST CD JACKSON TN MAYER TS

Citation: A. Mitra et al., MAGNETRON ION ETCHING OF THROUGH-WAFER VIA HOLES FOR GAAS MONOLITHIC MICROWAVE INTEGRATED-CIRCUITS USING SICL4, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(5), 1998, pp. 2695-2698

Authors: MICOVIC M NORDQUIST CD LUBYSHEV D MAYER TS MILLER DL STREATER RW SPRINGTHORPE AJ

Citation: M. Micovic et al., FABRICATION OF HETEROJUNCTION BIPOLAR-TRANSISTORS WITH BURIED SUBCOLLECTOR LAYERS FOR REDUCTION OF BASE-COLLECTOR CAPACITANCE BY MOLECULAR-BEAM EPITAXY REGROWTH, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 962-967

Authors: ZAVIEH L NORDQUIST CD MAYER TS

Citation: L. Zavieh et al., OPTIMIZATION OF IN0.53GA0.47AS REACTIVE ION ETCHING WITH CH4 H-2 USING DESIGN OF EXPERIMENT METHODS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1024-1029