Authors:
Kawasaki, H
Doi, K
Namba, J
Suda, Y
Ohshima, T
Ebihara, K
Citation: H. Kawasaki et al., Characterization of tantalum nitride thin films fabricated by pulsed Nd : YAG laser deposition method, JPN J A P 1, 40(4A), 2001, pp. 2391-2394
Authors:
Suda, Y
Doi, K
Namba, J
Imura, F
Kawasaki, H
Citation: Y. Suda et al., Formation and properties of carbon nitride thin films by pulsed Nd : YAG laser deposition, JPN J A P 1, 40(2B), 2001, pp. 1061-1063