Authors: Postnikov, SV Stewart, MD Tran, HV Nierode, MA Medeiros, DR Cao, T Byers, J Webber, SE Wilson, CG

Citation: Sv. Postnikov et al., Study of resolution limits due to intrinsic bias in chemically amplified photoresists, J VAC SCI B, 17(6), 1999, pp. 3335-3338