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Results: 2
Comparison of CxNy : H films obtained by deposition using magnetron sputtering or an inductively coupled plasma
Authors: Zeze, DA North, DR Brown, NMD Anderson, CA
Citation: Da. Zeze et al., Comparison of CxNy : H films obtained by deposition using magnetron sputtering or an inductively coupled plasma, SURF INT AN, 29(6), 2000, pp. 369-376
Investigation of the uniformity and coverage of CxNy : H overcoatings during PECVD in an inductively coupled plasma
Authors: Zeze, DA North, DR Brown, NMD Anderson, CA
Citation: Da. Zeze et al., Investigation of the uniformity and coverage of CxNy : H overcoatings during PECVD in an inductively coupled plasma, SURF INT AN, 29(3), 2000, pp. 201-207
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