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Study of crystal growth mechanism for poly-Si film prepared by excimer laser annealing
Authors:
Matsuo, N Aya, Y Kanamori, T Nouda, T Hamada, H Miyoshi, T
Citation:
N. Matsuo et al., Study of crystal growth mechanism for poly-Si film prepared by excimer laser annealing, JPN J A P 1, 39(2A), 2000, pp. 351-356
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