Authors:
Ruchhoeft, P
Colburn, M
Choi, B
Nounu, H
Johnson, S
Bailey, T
Damle, S
Stewart, M
Ekerdt, J
Sreenivasan, SV
Wolfe, JC
Willson, CG
Citation: P. Ruchhoeft et al., Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography, J VAC SCI B, 17(6), 1999, pp. 2965-2969
Authors:
Ruchhoeft, P
Wolfe, JC
Wasson, J
Torres, J
Wu, H
Nounu, H
Liu, N
Herbordt, M
Morgan, MD
Tiberio, RC
Citation: P. Ruchhoeft et al., Fabrication of silicon stencil masks with vitreous carbon ion-absorbing coatings, J VAC SCI B, 16(6), 1998, pp. 3599-3601