Authors:
Karecki, S
Chatterjee, R
Pruette, L
Reif, R
Vartanian, V
Sparks, T
Beu, L
Novoselov, K
Citation: S. Karecki et al., Characterization of iodoheptafluoropropane as a dielectric etchant. I. Process performance evaluation, J VAC SCI B, 19(4), 2001, pp. 1269-1292