Authors:
Rosenbusch, A
Cui, Z
DiFabrizio, E
Gentili, M
Glezos, N
Meneghini, G
Nowotny, B
Patsis, G
Prewett, P
Raptis, I
Citation: A. Rosenbusch et al., Simulation of chemically amplified resist processes for 150 nm e-beam lithography, MICROEL ENG, 46(1-4), 1999, pp. 379-382
Citation: W. Erath et al., Modelling the fluid structure interaction produced by a waterhammer duringshutdown of high-pressure pumps, NUCL ENG DE, 193(3), 1999, pp. 283-296