Authors: KHAN AH ODEH MF MEESE JM CHARLSON EM CHARLSON EJ STACY T POPOVICI G PRELAS MA WRAGG JL

Citation: Ah. Khan et al., GROWTH OF ORIENTED ALUMINUM NITRIDE FILMS ON SILICON BY CHEMICAL-VAPOR-DEPOSITION, Journal of Materials Science, 29(16), 1994, pp. 4314-4318