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TEMPERATURE-DEPENDENCE OF THE BIAXIAL MODULUS, INTRINSIC STRESS AND COMPOSITION OF PLASMA-DEPOSITED SILICON OXYNITRIDE FIRMS
Authors:
HARDING DR OGBUJI LUT FREEMAN MJ
Citation:
Dr. Harding et al., TEMPERATURE-DEPENDENCE OF THE BIAXIAL MODULUS, INTRINSIC STRESS AND COMPOSITION OF PLASMA-DEPOSITED SILICON OXYNITRIDE FIRMS, Journal of applied physics, 78(3), 1995, pp. 1673-1680
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