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Results:
1-8
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Results: 8
Authors:
IZUMI Y
OHTE T
KOJIMA A
Citation: Y. Izumi et al., DAMAGE REDUCTION OF PLASMA-TREATED CARBON SURFACES BY CONTROLLED PLASMA, JPN J A P 1, 36(4A), 1997, pp. 2372-2378
Authors:
IZUMI Y
OHTE T
KOJIMA A
Citation: Y. Izumi et al., PLASMA COMPONENT FILTERING THROUGH A HOLE USING THE SHEATH GENERATED AROUND THE HOLE ON SURFACE MODIFICATION BY RF PLASMA, JPN J A P 1, 36(11), 1997, pp. 7004-7008
STABILIZATION OF CF4 PLASMA-TREATED CARBON SURFACE BY HEAT-TREATED DURING AND AFTER PLASMA TREATMENT
Authors:
IZUMI Y
KAMATA K
KATOH M
OHTE T
KOJIMA A
Citation: Y. Izumi et al., STABILIZATION OF CF4 PLASMA-TREATED CARBON SURFACE BY HEAT-TREATED DURING AND AFTER PLASMA TREATMENT, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 1937-1942
Authors:
KATOH M
OHTE T
TAKAHASHI A
MIYASHITA K
OHTANI S
KOJIMA A
Citation: M. Katoh et al., DIFFERENCES BETWEEN EFFECTS OF IONS IN PLASMA ON THE EDGE SURFACE OF CARBON MATERIAL AND THOSE ON THE BASAL SURFACE, Surface & coatings technology, 92(3), 1997, pp. 230-234
Authors:
IZUMI Y
KATOH M
OHTE T
OHTANI S
KOJIMA A
SAITOH N
Citation: Y. Izumi et al., HEATING EFFECTS ON MODIFYING CARBON SURFACE BY REACTIVE PLASMA, Applied surface science, 101, 1996, pp. 179-183
Authors:
KATOH M
IZUMI Y
KIMURA H
OHTE T
KOJIMA A
OHTANI S
Citation: M. Katoh et al., INVESTIGATION OF CHARACTERISTICS OF CARBON MATERIALS WITH VARIOUS STRUCTURES MODIFIED BY PLASMAS USING PLASMA DIAGNOSTICS AND MATERIAL-SURFACE ANALYSIS, Applied surface science, 101, 1996, pp. 226-231
Authors:
OHTE T
AOYAMA H
GOTO M
SUGAWARA M
Citation: T. Ohte et al., REDUCTION OF PLASMA DAMAGE IN REACTIVE ION ETCHING BY MEANS OF SUPPRESSING SELF-BIAS, JPN J A P 1, 33(7B), 1994, pp. 4461-4464
Authors:
OHTE T
KOJIMA A
KATOH M
KAMATA K
OHTANI S
Citation: T. Ohte et al., SURFACE CHARACTERIZATION OF CARBON SURFACES BY COLD-PLASMA TREATMENT, Carbon, 32(1), 1994, pp. 177-181
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